High standards for protective coatings in the semiconductor industry

As semiconductor manufacturing processes continue to develop towards finer nodes such as 5nm and 3nm, unprecedented high purity requirements are placed on device protective materials. Parylene coating, as a vacuum vapor deposition polymer with excellent performance, is becoming an indispensable key protective material in semiconductor manufacturing and packaging due to its excellent chemical stability, uniformity and ultra-high purity characteristics. Shenzhen Fangcunda Technology Co., Ltd. relies on years of technical accumulation and industry experience to provide the semiconductor industry with high-purity Parylene coating solutions that meet international standards.

Special requirements of the semiconductor industry for protective coatings

1. Ultra-high purity standards

● Metal ion content is required to be lower than ppb level (parts per billion)

● No particulate contaminants (in compliance with Class 10 clean room standards)

● Low outgassing characteristics (total mass loss TML <1%)

2. Process compatibility challenges

● Need to withstand high temperature annealing processes in semiconductor manufacturing (up to 450°C)

● Compatible with processes such as photolithography and etching

● No impact on subsequent bonding and packaging processes

3. Performance stability requirements

● No performance degradation in long-term working environments

● Anti-plasma erosion

● Anti-static accumulation characteristics

Core advantages of Parylene coatings in semiconductor applications

1. Material property advantages

● Ultra-high purity: raw material purity is more than 99.0%

● No pinhole defects: vapor deposition forms a completely dense film

● Chemical inertness: resistant to acids, alkalis, organic solvents and plasma

2. Process advantages

● Low temperature deposition (room temperature) without damaging sensitive devices

● Uniform coverage: 3D structures and high aspect ratio features can be perfectly coated

● Controllable thickness: 0.1-50μm precise control

3. Functional advantages

● Excellent dielectric properties: volume resistivity>10¹⁶Ω·cm

● Moisture barrier: water vapor transmission rate<0.1g·mm/m²·day

● Minimal stress: no wafer warping

Differentiated advantages of Shenzhen Fangcunda Technology

1. Professional high-purity coating system

● Configured Class 10 ultra-clean coating workshop

● Use imported high-purity raw materials (in line with SEMI standards)

● All stainless steel vacuum system to avoid metal contamination

2. Advanced process technology in the industry

● Original "three-step purification" pretreatment process

● Accurate thickness control technology (±5%μm)

● Special fixture system designed for wafers

3. Complete detection capabilities

● ICP-MS detects metal impurity content

● GC-MS analyzes organic pollutants

● Complies with JEDEC J-STD-020 moisture sensitivity test

4. Semiconductor industry service experience

● Provides services to multiple wafer fabs and packaging and testing companies

● Familiar with the needs of the entire semiconductor manufacturing process

● Quickly respond to customers' special customization needs

In the semiconductor industry, where high-purity requirements are increasingly stringent, Shenzhen Fangcunda Technology relies on professional Parylene coating technology and deep industry experience to provide customers with high-quality protection solutions that meet international standards. The company will continue to invest in research and development to promote the innovative application of Parylene coating technology in advanced semiconductor processes and packaging, and help the development of China's semiconductor industry.

(For more technical details or customized solutions, please contact Shenzhen Fangcunda Technology's professional technical team)