Parylene coating deposition process

The vapor deposition preparation process of Parylene coating is as follows:

a. The solid parylene raw material absorbs heat and sublimates in the evaporation chamber;

b. The sublimated parylene gas enters the cracking chamber and forms active parylene monomers under high temperature;

c. The parylene monomer is sent to a vacuum deposition chamber at room temperature, where it is deposited and polymerized on the surface of the workpiece, eventually forming a dense protective film.